Fan Filter Units (FFU) Failures Due to Strong EMF

In year 2009, PowerQ had conducted an Electromagnetic Field survey emitted from crystal growth furnace. This was performed to find out the level of interference that caused the damage of several Fan Filter Units (FFU) at a new Wafer Fab in Singapore.

To manage this issue, PowerQ Engineers had installed EMF data logger to measure and monitor the EMF emissions in the areas over time and capture any peak values. The data were recorded for several weeks and at interval of 1-minute under varied operating condition. PowerQ had communicated the observation status and re-measured EMF after the proposed measures had been implemented. This was to analyze the collective information of EMF interference by minimum and maximum field strength readings.

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Updated on

June 11, 2018